Observation with scanning electron microscope

EDS MICROANALYSIS

Purpose
The microanalysis performed by using probe EDS, allows precise qualitative analysis of small size components (inclusions) and the analysis of coatings.

Description
The chemical analysis (microanalysis) in the scanning electron microscope (SEM) is performed by measuring the energy and the distribution of the intensities of X-rays generated by the electron beam on the sample using an energy dispersive detector EDS (energy dispersive spectrometry) . The analysis that is produced can be either of the area that is enlarged at that time or, stopping the scanning electron beam, of a point of interest on the sample surface (microanalysis). Since the portion of space excited by the electron beam, which produces the spectrum X, is a few microns space around the point, the SEM + EDS is a powerful means of investigation of chemically inhomogeneous solids at a microscopic scale.

What is it for?
The identification of elements constituent inclusions allows to identify the type and the origin. It allows to evaluate the type of coating of a component.

On what this analysis is performed / sampling
The analysis is performed on solid samples even in the form of chips. Large size samples must be dissected to be inserted into the chamber of the scanning microscope.