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Glossary of terms
The Auger spectroscopy allows to characterize the chemical composition of the sample surface both qualitatively and quantitatively.
Using this technique can only be detected chemical elements present on the sample surface to a depth of about 1-5 nanometers.
It is possible to select the exact area of interest on which perform the analysis.
Since the sample surface is often characterized by the presence of atmospheric contaminants (almost exclusively carbon and oxygen), the surface can be cleaned using a beam of Argon ions, which removes few nanometers of surface material.
It is also possible to detect the concentration of certain elements as a function of depth (maximum depth of analysis: 3-5μm)
RANGE OF APPLICATION:
• ANALYSIS OF SURFACE CONTAMINATION IN LOCALIZED AREAS
• ANALYSIS OF MULTILAYERS (IT IS POSSIBLE TO DETECT LAYERS OF 10 nm).
Minimum Sensitivity: 0.1 to 0.5% in the concentration of weight.
Technique of chemical analysis of the first 5-10 nanometers in surface on an area which can vary between about 20x20μm to 200x200μm.
Sample maximum size 1cm x 1cm x 1cm (both solid and powder), usually it is possible to carry on the analysis on curved samples.
Glossary of terms
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